High Strength Machining Ceramic Parts Ceramic Components for
The structures of ceramic components are very simple. Resistive
heating element and Electrode are embedded in the core material of
the heater, which is made of Aluminum nitride ceramics by
sintering. The maximum temperature of the heater is 800 centigrade.
The ceramic heaters and E-Chuck can provide a wide range of stable
temperature and have the superior strength under the severe
semiconductor manufacturing process.
Semiconductor equipment manufacturers, fabricators and ceramic
material manufacturers rely on Mingrui for precision machining of
critical components for semiconductor process equipment.
Our extensive knowledge in the machining of glass and ceramics,
combined with unique ultrasonic machining capabilities, enable Bullen to provide custom, high-quality,
cost-effective solutions meeting the strict requirements of the
Mingrui is capable of machining high aspect ratio precision
features in 300 mm diameter components in a wide range of
semiconductor materials, including CVD Silicon Carbide, Alumina,
Sapphire, Aluminum Nitride, Silicon, Silicon Nitride, Yttriaand
Part types machined include:
- Gas distribution plates, showerheads (electrodes)
- Wafer chucks
- Wafer carriers
Typical machining processes include:
- Fabrication of through-hole vias for semiconductor GDPs
- Fabrication of mesas and cavities for wafer carrier or vacuum
- OD grinding
- Face grinding
Advantages to working with Mingrui
- Unique ultrasonic machining allows for the machining of multiple
features simultaneously, leading to reduced part costs. Learn more about ultrasonic machining.
- Ultrasonic machining is a low MRR process. This means the machined
features exhibit little or no subsurface damage, resulting in
outstanding particle performance and higher process yields.
- Reliable, consistent high quality means reduced downtime and higher
process yields in your process.
- Our ability to handle prototype through production volumes offers
you maximum flexibility.
We ( Dongguan Mingrui Ceramic Technology Co., Ltd ) are a
professional manufacturer specialized
in R&D, manufacturing and selling customized all kinds of high
precision zirconia and alumina ceramic parts . Our main products
include ceramic rod , ceramic tube, ceramic plunger, ceramic valve,
ceramic plate, ceramic shaft and bearing , ceramic nozzle etc ,
which are mainly used in industrial fields of Machinery,
Petrochemical oil and gas, Valves, Automotive, Food Processing,
Fluid Handling, Process Control, Thermal Processing, Aerospace,
Defense, Eletronic and Electrical, Textile, Mechanical,
Engineering, Mineral Processing, etc.
We have a full service include mold design and development ,
ceramic forming , precision machining
and precision detection technology. We have achieved great
successes in particular requirements
which is based on cooperating with Tsinghua University and getting
rich experience by our professional technical engineer teams . Our
factory have an unique technical called mirror polishing which
our products more smooth , bright than other competitors.
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Quality control process :
1. What kind of industry ceramics do you have ?
We specialized in 95% 97% 99% alumina ceramic and zirconia ceramic
2. What kind of molding method do can you supply ?
Dry Pressing , isostatic pressing , grouting , hot-chamber die
casting , tape casting , injection molding, etc, injection molding
and isostatic molding is the most commonly used.
3.What stabilizer do you use when processing ?
Yttria stabilizer is the most commonly used in our industrial
4.Can you produce free samples for me ?
Yes usually , we can produce free samples for you but it is up to
the product complexity .
5.What terms can you accept for payment ?
T/T, L/C , Western union , Money Gram and Paypal is welcome , but
paypal and western union only for small -sum payment.
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